Laser micro machining as well as laser surface structuring are innovative manufacturing technologies with a wide range of machinable materials and a high level of flexibility. During the last years these technologies experience a strong increase in its industrial application due to these characteristics. With it new process requirements are demanded, as increasing process accuracy and smaller tolerances as well as the machining of novel materials. As a solution concept for the presented challenges an innovative inline metrology system has been developed within the project Scan4Surf, funded within the 7th framework program of the European Union. The solution concept developed in this work had as main goal the implementation of a non-contact, high precision measurement system using the same optical path as the structuring laser (scanning unit and telecentric f-theta optics) for monitoring and quality control. The measured machined depth is feedback to the process controlling system, which readjusts the process parameters based on different techniques for achieving optimal, reproducible process results. The developed optical measurement system is based on the frequency domain optical coherence radar and is able to measure with sub-micrometer accuracy the depth and topography of a laser machined part. Possible usage of this technique is in the automatic component positioning and form detection, the automatic process initialization (laser parameter optimization), adaptive production and in situ quality assurance as well as repair processes. Examples of application areas are for example in precision engineering, electronics, medical and automotive industries, as well as toll making.
|Autor||Robert Schmitt, Guilherme Mallmann (Hrsg.)|